| SPIN COATER |
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| This equipment is high precision small spin coater to coat photo-resist
on the silicon wafer. |
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＜K-359S1 Simple type＞（discontinued）
２ steps/Analog meter/MAX6000rpm/Sample size～４ inchφ
details |
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＜K-359S1 Smple type＞
２ steps/Digital meter/MAX6000rpm/Sample size～４ inchφ
details |
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＜K-359SＤ１＞
３ steps/Dital meter/MAX7000rpm/Sample size～６inchφ
Pressure sensor/Lid with interlock
details |
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＜K-359SＤ２＞
３ steps/Digital meter/MAX7000rpm/Sample size～８ inchφ
Pressure sensor/Lid with interlock
details |
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＜K-359SＤ３＞
３ steps/Digital meter/MAX3000rpm/Sample size～１２ inchφ
Pressure sensor/Lid with interlock/Exhaust
details |
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| OPTION |
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＜Common Vacuum Chuck＞
We will design according to your sample sizes.
details |
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