 |
menu▼ |
 |
|
| ＜Mask Aligner＞ K-400PS95 |
 |
| Exposure |
Very high pressure mercury lamp |
| Exposure area |
90mmφ |
| Light intensity |
11mW/c㎡ or more |
| Mask Holder |
will discuss |
| Microscope lamp house |
Revolution displacement（manual） |
| X axis displacement |
10mm 500μm/turn |
| Y axis displacement |
10mm 500μm/turn |
| Z axis displacement |
10mm |
| θaxis displacement |
±10° |
| Exposure time |
0.1～999.9sec |
| ON/OFF delay timer for lamp cooling fan |
ON=slow ventilation at the first stage when mercury lamp is lit, 0～5min
OFF=cooling after mercury lamp has gone off, 0～30min |
| Dimension |
W 1000×D 600×H 1400mm |
|
|
|
| OPTION |
| Microscope |
| ■SMZ800（with coaxial light） 15×～94.5× zoom |
| ■SMZ1000（with coaxial light） 54×～540×zoom |
| ■Two-view Micrtoscope（with coaxial light） 100×,200× |
| Vacuum Pump |
| ■DA-30S(Ultimate pressure 200 Torr) |
|
|
 |
Kyowa Riken Co., Ltd. |
3-37-3 Izumi, Suginami-Ku, Tokyo 168-0063, Japan
TEL ０３（３３２１）９９１１ FAX ０３（３３２１）９９１７
E-MAIL:sales@kyowariken.co.jp |
|
|