Light source & exposure unit USHIO multi-light hi Ultra high presssure mercury lamp Exposure area 100mmφ Main wave length II type or IG type Light intensity 25mW/c�u more Uniformity ±5% or less Parallelism ±１°or less Mask holder will discuss Nicroscope lamp house Coaxial revolution displacement (manual) X,Y axes displacement 10mm　500μm/turn Z axis displacement 10mm θ axis displacement 10° Negative mask and sample simultaneous displacement 100mm displacement on X,Y axes, 2mm/turn Exposure time 0.1〜999.9sec　 ON/OFF delay timer for lamp cooling fan ON=slow ventilation at the first stage when mercury lamp is lit, 0〜5min OFF=cooling after mercury lamp has gone off, 0〜30min Dimension W 730×D 530×H 850mm