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Mask Aligner@j|RPOoPOOr/PUTr
Light source & exposure unit USHIO multi-light, Ultra high pressure mercury lamp
Exposure area 100mm(K-310P100S)
165mm(K-310P165S)
Main wave length II type or IG type
Light intensity 25mW/cu more(K-310P100S)
9mW/cumore(K-310P165S)
Uniformity }5% or less
Parallelism }Por less
Mask holder will discuss
Microscope lamp house Coaxial revolution displacement imanualj
X,Y axes displacement 13mm@500m/turn in 10m
X,Y axes fine adjustment 0.2mm@25m/turn in 0.5m
Z axis displacement 10mm
Z axis dial gauge 1mm in 1m
axis displacement 10
Negative mask and sample simultaneous displacement 100mm displacement on X,Y axes, 2mm/turn
Exposure time 0.1`999.9sec@
ON/OFF delay timer for lamp cooling fan ON=slow ventilation at the first stage when mercury lamp is lit ,0`5min
OFF=cooling after mercury lamp has gone off, 0`30min
Dimension W 840~D 625~H 865mm
OPTION
Microscope
SMZ800iwith coaxial lightj@15~`94.5~ zoom
SMZ1000iwith coaxial lightj@54~`540~zoom
Two-view Microscopeiwith coaxial lightj@100~,200~
Vacuum Pump
DA-30S(Ultimate pressure 200 Torr)

Kyowa Riken Co., Ltd.
3-37-3 Izumi, Suginami-Ku, Tokyo 168-0063, Japan
TEL@ORiRRQPjXXPP@@FAX@ORiRRQPjXXPV

E-MAIL:sales@kyowariken.co.jp