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| ＜Mask Aligner＞ Ｋ－３０９ＰＷ９５ |
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| Exposure |
Very high pressure mercury lamp |
| Exposure area |
90mmφ |
| Light intensity |
11mW/c㎡ |
| Mask holder |
will discuss |
| Microscope lamp house |
Revolution displacement（manual) |
| X,Y axes displacement |
13mm 500μm/1 turn
10μm/1gauge |
| X,Y axes displacement |
0.2mm 25μm/1turn
0.5μm/1gauge |
| Z axis displacement |
10mm |
| θaxis displacement |
10° |
| Exposure time |
0.1～999.9sec |
| ON/OFF delay timer for lamp cooling fan |
ON=slow ventilation at the first stage when mercury lamp is lit 0～5min
OFF=cooling after mercury lamp has gone off 0～30min |
| Dimension |
W 730×D 530×H 850mm |
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| OPTION |
| Microscope |
| ■SMZ800（with coaxial light） 15×～94.5× zoom |
| ■SMZ1000（with coaxial light） 54×～540× zoom |
| ■Tow-view Microscope（with coaxial light） 100×,200× |
| Vacuum Pump |
| ■DA-30S(Ultimate pressure 200 Torr) |
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Kyowa Riken Co., Ltd. |
3-37-3 Izumi, Suginami-Ku, Tokyo 168-0063, Japan
TEL ０３（３３２１）９９１１ FAX ０３（３３２１）９９１７
E-MAIL:sales@kyowariken.co.jp |
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