|
menu |
|
|
Mask Aligner@j|ROVorXT |
|
Exposure |
Very high pressure mercury lamp |
Exposure area |
90mm |
Light intensity |
Approx. 11mW/cu |
Mask holder |
will discuss |
Microscope lamp house |
Revolution displacement |
X,Y axis fine adjustment |
10mm@500m/1turn |
Z axis find adjustment |
10mm |
axis adjustment |
10 |
Timer for lamp shutter |
0.1`999.9sec |
ON/OFF delay timer for lamp cooling fan |
ON=slow ventilation at the first stage when mercury lamp is lit, 0`5min.
OFF=cooling after mercury has gone offn0`30min. |
Dimension |
W 730~D 530~H 750mm |
|
|
|
OPTION |
Microscope |
SMZ800iwith coaxial lightj@15~`94.5~ zoom |
SMZ1000iwith coaxial lightj@54~`540~zoom |
Two-view Microscopeiwith coaxial lightj@100~,200~ |
Vacuum Pump |
DA-30S(Ultimate pressure 200 Torr) |
|
|
|
Kyowa Riken Co., Ltd. |
3-37-3 Izumi, Suginami-Ku, Tokyo 168-0063, Japan
TEL@ORiRRQPjXXPP@@FAX@ORiRRQPjXXPV
E-MAIL:sales@kyowariken.co.jp |
|
|