Sample size Max. 4 inchφ Sample fixing By vacuum Sample stage pulling Pulled toward operator up to 90mm Sample stage θaxis displacement 360° Sample stage X,Y axes displacement 100mm,2mm/1turn in 20μm Arm ring Z axis displacement 8mm Arm ring Z axis fine adjustment 0〜100μm Microscope stand 24.5mm pole outer diameter Weight Approx. 18.5kg Dimension W 360×D 456×H 404mm Option Manipulator・Holder・Probe・Microscope・Shield case. etc.