| Sample size |
Max. 4 inchφ |
| Sample stage temperature |
Room tep.～300℃（by temperature controller） |
| Sample fixing |
By vacuum |
| Sample stage pulling |
Pulled toward operator up to 90mm |
| Sample stage θaxis displacement |
360° |
| Sample stage X,Y axes displacement |
(K-160MPH)
40mm,500μm/1turn in 5μm (K-160MWH)
100mm,2mm/1turn in 20μm |
| Sample stage Z axis displacement |
10mm(k-160MPH)
※K-160MWH does not have this function |
| Arm ring Z axis displacement |
8mm |
| Arm ring Z axis fine adjustment |
0～100μm |
| Microscope stand |
24.5mm pole outer diameter |
| Weight |
Approx. 19kg |
| Dimension |
W 360×D 456×H 430mm |
| Option |
Manipulator・Holder・Probe・Microscope・Shield Case, etc. |
