Motor YASUKAWA Print Motor 75W Nos. of revolution 200〜6000rpm Vacuum switch open/close ON460mmHg OFF400mmHg Power supply AC100V 7A Timer 0〜999sec Nos. of steps Programmable 2 steps Sample fixing By vacuum Vacuum pump piping nozzle Outer diameter 6mmφ（left side） Max sample size 4 inchφ wafer Cup size 270mmφ SUS Dimension W 325×D 415×H 230mm Weight Approx. 17kg Option Vacuum chuck, Vacuum pump