DRILLER for Coating Thickness Measurement@j|UXiPTO
This instrument is used steel balls as abrasive jig, and it is simple and easy measuring the thickness of Si epitaxial layer or diffusion layer.
Motor DC100V 25W 0.6A
Size wafer 6inch
Fixing method By vacuum absorption
Stage horizontal rotation CW,CCW per 180/90each 4 points
Stage movet on xaxis 150mm
Drilling depth Set by Microhead Meter
Drilling pressure Set by weight adjustment
Drilling revolving speed 1000`4000rpm
Drilling timer 0.1`999.9sec
Power supplu AC100V 3A
Dimension W 475~D 280~H 275mm
Weight Approx. 16kg

Kyowa Riken Co., Ltd.
R|RV|R Izumi, Suginami-Ku, Tokyo 168-0063, Japan