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| ＜DRILLER for Coating Thickness Measurement＞ Ｋ－６９Ｊ１５０ |
| This instrument is used steel balls as abrasive jig, and it is simple and
easy measuring the thickness of Si epitaxial layer or diffusion layer. |
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| Motor |
DC100V 25W 0.6A |
| Size |
wafer 6inchφ |
| Fixing method |
By vacuum absorption |
| Stage horizontal rotation |
CW,CCW per 180°/90°each 4 points |
| Stage movet on Ｙaxis |
150mm |
| Drilling depth |
Set by Microhead Meter |
| Drilling pressure |
Set by weight adjustment |
| Drilling revolving speed |
1000～4000rpm |
| Drilling timer |
0.1～999.9sec |
| Power supplu |
AC100V 3A |
| Dimension |
W 475×D 280×H 275mm |
| Weight |
Approx. 16kg |
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Kyowa Riken Co., Ltd. |
３－３７－３ Izumi, Suginami-Ku, Tokyo 168-0063, Japan
TEL ０３（３３２１）９９１１ FAX ０３（３３２１）９９１７
E-MAIL:sales@kyowariken.co.jp |
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