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| ＜Silicon Wafer Lifetime Meter＞ Ｋ－７２０LH2 |
This instrument measures silicon wafer's lifetime using a resonance circuit
principle.
This method enables non-contact, easy measurement of a wafer's lifetime.
This method most efficiently demonstrates its power by selecting an appropriate
oscilloscope. |
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| Lifetime range |
1μS～1000μS(>1Ω・cm) |
| Resolution |
20mmφ |
| Source Frequency |
40MHz |
| Light source |
Infrared LED |
| Sample size |
20mmφ～200mmφ t max=2.0mm |
| Dimension |
W 260×D 470×H 290mm |
| Power consumption |
AC100V 50W |
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Kyowa Riken Co., Ltd. |
３－３７－３ Izumi, Suginami-Ku, Tokyo 168-0063
TEL ０３（３３２１）９９１１ FAX ０３（３３２１）９９１７
E-MAIL:sales@kyowariken.co.jp |
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